MEMS/NEMS | Office of Technology Licensing

Available Technologies by Category
Flexible Electrical Interconnects with Concave/Convex Platform	Co-fabrication of very complex interconnect structures for developing and testing different system topologies Improved system performance while increasing packaging density with little or no impact on the fabrication process steps used Complex shapes easily fabricated without compromising the mechanical strength or the electrical performance	6957
Fabrication of Slanted Electrodes in MEMS Devices	High Performance – slanted electrodes provide more capabilities and possibilities for MEMS devices Consolidated – reduces the need for large systems of MEMS Versatile – MEMS with slanted electrodes can be applied to many applications	7324
Method of Increasing III-Nitride Semiconductor Growth Rate	Faster growth rates result in reduced epitaxy cost Ability to grow at lower temperatures reduces thermal budget, stress and wafer bowing Ability to grow pseudo-substrates of any III-nitride alloy composition	7009
Chemical Etching of Semiconductive Substrate	Quick – wafers can be processed in parallel, as compared to only one at a time with the current approach Low cost – tooling for this approach is much less expensive than that required for the currently used method; simple, inexpensive chemical	6696
High-Frequency AIN-on-Silicon Resonant Square Gyroscopes	Low-cost – Straightforward manufacturing process reduces cost and complexity Higher frequency operation – Realizes higher frequency of operation for resonant gyroscopes and provides higher rotation rate sensitivity	6375
Graphene Transistors: Nanoscale Electronic Components	Faster: Near-ballistic charge transport properties Cooler: Virtually no heat generation at high speeds Stronger: 100 times stronger than steel	5766
Stiffness Trimming of High Q MEMS Clocks and Oscillators	High resolution stiffness trimming of high-Q Lame mode silicon resonators Stable frequency characteristics of Ge-coated Si resonators at high processing temperatures Achieves trimming without introducing any damping throughout process	7184
Non-contact vital sign detection	Automatically adjusts the feedback signals to suppress the noise when the measurement environment changes Improves SNR by 50% at 50 cm when compared to an unlocked system Detects heartbeat at 250 cm, more than twice the distance of the unlocked system	7064

Technologies