Technologies by Farrokh Ayazi
Resonators for Temperature-Stable Oscillators
A new design for resonators that will stabilize temperatures at high frequency rates.
7780
Integrated Cascaded Atomic Beam
An accurate cascaded atomic beam to aid in gyroscope applications and atomic clocks.
7917
Piezo-On-Diamond Resonators and Resonator Systems
Piezoelectrically-transduced micromachined bulk acoustic resonators fabricated on a polycrystalline diamond film
3870
Self-Aligned HARPSS Micromechanical Variable Capacitors
A silicon micro-fabrication technique for the implementation of tunable capacitors with very small tuning voltages
4359
Fabrication of Slanted Electrodes in MEMS Devices
A method to fabricate microelectronic mechanical systems (MEMS) devices with horizontal and slanted electrodes
7324
High-Precision Microphone for Body-Worn Devices
A high-precision and high-bandwidth accelerometer contact microphone (ACM) for body-worn auscultation devices
7891
High-Frequency AIN-on-Silicon Resonant Square Gyroscopes
A high-frequency resonant square micro-gyroscope using piezoelectric transduction
6375
Block Resonator Biosensor with Annexed Platform
A high-Q longitudinal block resonator with an annexed platform for mass sensing
3255
Stiffness Trimming of High Q MEMS Clocks and Oscillators
A high resolution method to trim the resonance frequency of high-Q single-crystal silicon MEMS resonators coated with a thin-film germanium layer
7184