Techs by Farrokh Ayazi


Virtually Levitated Hybrid Shell Resonator Gyroscope A micro-hemispherical resonating gyroscope that can operate in whole angle mode.	6855, 6581
Resonators for Temperature-Stable Oscillators A new design for resonators that will stabilize temperatures at high frequency rates.	7780
Integrated Cascaded Atomic Beam An accurate cascaded atomic beam to aid in gyroscope applications and atomic clocks.	7917
Piezo-On-Diamond Resonators and Resonator Systems Piezoelectrically-transduced micromachined bulk acoustic resonators fabricated on a polycrystalline diamond film	3870
Self-Aligned HARPSS Micromechanical Variable Capacitors A silicon micro-fabrication technique for the implementation of tunable capacitors with very small tuning voltages	4359
Fabrication of Slanted Electrodes in MEMS Devices A method to fabricate microelectronic mechanical systems (MEMS) devices with horizontal and slanted electrodes	7324
High-Precision Microphone for Body-Worn Devices A high-precision and high-bandwidth accelerometer contact microphone (ACM) for body-worn auscultation devices	7891
High-Frequency AIN-on-Silicon Resonant Square Gyroscopes A high-frequency resonant square micro-gyroscope using piezoelectric transduction	6375
Block Resonator Biosensor with Annexed Platform A high-Q longitudinal block resonator with an annexed platform for mass sensing	3255
Stiffness Trimming of High Q MEMS Clocks and Oscillators A high resolution method to trim the resonance frequency of high-Q single-crystal silicon MEMS resonators coated with a thin-film germanium layer	7184

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