Virtually Levitated Hybrid Shell Resonator Gyroscope A micro-hemispherical resonating gyroscope that can operate in whole angle mode. |
6855, 6581 |
Resonators for Temperature-Stable OscillatorsA new design for resonators that will stabilize temperatures at high frequency rates. |
7780 |
Integrated Cascaded Atomic Beam An accurate cascaded atomic beam to aid in gyroscope applications and atomic clocks. |
7917 |
Piezo-On-Diamond Resonators and Resonator SystemsPiezoelectrically-transduced micromachined bulk acoustic resonators fabricated on a polycrystalline diamond film |
3870 |
Self-Aligned HARPSS Micromechanical Variable CapacitorsA silicon micro-fabrication technique for the implementation of tunable capacitors with very small tuning voltages |
4359 |
Fabrication of Slanted Electrodes in MEMS DevicesA method to fabricate microelectronic mechanical systems (MEMS) devices with horizontal and slanted electrodes |
7324 |
High-Precision Microphone for Body-Worn DevicesA high-precision and high-bandwidth accelerometer contact microphone (ACM) for body-worn auscultation devices |
7891 |
High-Frequency AIN-on-Silicon Resonant Square GyroscopesA high-frequency resonant square micro-gyroscope using piezoelectric transduction |
6375 |
Block Resonator Biosensor with Annexed PlatformA high-Q longitudinal block resonator with an annexed platform for mass sensing |
3255 |
Stiffness Trimming of High Q MEMS Clocks and OscillatorsA high resolution method to trim the resonance frequency of high-Q single-crystal silicon MEMS resonators coated with a thin-film germanium layer |
7184 |