MEMS/NEMS | Technology Licensing

Available Technologies by Category

Parametric Resonance Approach for Efficient, Versatile Acoustic Power Transfer for Implantable/Wearable Devices, Sensing, and Communications Wireless power transfer and acoustic sensing is limited to low-power applications and low-loss conditions	7635, 9075
Improved Discrimination Performance in MEMS-Based Gas Sensors Enhancing selectivity without tailoring sensing layer chemistry	8987
Electronic Immunoassay Using Enzymatic Metallization on Microparticles Providing a sensitive, direct electronic readout without the use of intermediate optics	8813
Integrated Alkali Dispenser Collimator Precise, low-temperature alkali vapor delivery	8872
Chip-Scale Electrochemical Double-Layer (ECDL) Supercapacitors Using embedded carbon nanotubes to provide high-power energy storage for large and small electronic systems	6573
A Chip-Scale Linear Ion Trap to Enable Portable Mass Spectrometers Lowers size and weight while providing sub-unit resolution and high detection efficiency	8137
Heat Dissipation for Microelectronic Systems via Capillary Trap Enables hot-spot chip cooling via thin-film evaporation	6272
Integrating Electrical Sensors into Soft-Lithography Microfluidic Devices A streamlined fabrication process for creating a parallel electrode arrangement	7769
Utilizing Impedance Spectroscopy for Advanced Characterization of Particles A cell analysis technique for microfluidic devices that simultaneously measures the spatial and dielectric properties of particles	8049
Low-Cost Wearable Mass-Sensitive and Capacitive Bio/Chemical Multi-Sensor For embedded bio/chemical sensing applications	8269
Portable Multi-Parameter Cancer Diagnostic Tool Tissue characterization at the micro-scale aims to enable cancer diagnosis	7619
Rotary Mechanism for Lab-on-a-Chip Microvalves Novel micromechanism provides rotational motion for applications in microfluidic and other MEMS devices	3091
Multi-Functional Sparse Phased Arrays for Guiding Focused Ultrasound Therapies Highly sensitive and adaptable methods and systems to aid treatment planning and monitoring	8493
Technique Improves Printing Quality for 3D Nanoprinting Broadens industrial applicability for printing micro- and nanoscale structures	8478
Virtually Levitated Hybrid Shell Resonator Gyroscope A micro-hemispherical resonating gyroscope that can operate in whole angle mode.	6855, 6581
Resonators for Temperature-Stable Oscillators A new design for resonators that will stabilize temperatures at high frequency rates.	7780
Cost-Effective Compliant Off-Chip Interconnects Packaging techniques utilizing compliant interconnects with multiple electrical paths in an electronic package	3964
Electrical Path Interconnects for use in Electronic Packages A compliant interconnect technology called “FlexConnects”	4198
Heterogeneous Interconnect Geometries in Electronic Packages A variable interconnect geometry with increased electrical performance	4120
Interconnect Geometry for Electronic Packages A variable interconnect geometry formed on a substrate	3883
Patterned Graphene Structures on Silicon Carbide	5589
Improved Projection Exposure System for Fabricating Nanomaterials A single step photolithographic projection exposure system based on multi-beam interference lithography (MBIL) for making small devices	5283
Self-Aligned HARPSS Micromechanical Variable Capacitors A silicon micro-fabrication technique for the implementation of tunable capacitors with very small tuning voltages	4359
MINTED: Simultaneous Deformation and Temperature Imaging A system to record deformation and temperature data of microstructures simultaneously	8064
Electron Beam Induced Deposition of Nanostructures Mode of FEBID with the use of electro-spray-drive liquid jets with new capabilities in the fabrication of topologically-complex 3D nano-structures	6998
Flexible Electrical Interconnects with Concave/Convex Platform A process that is fully CMOS compatible and can be performed at very high densities	6957
Fabrication of Slanted Electrodes in MEMS Devices A method to fabricate microelectronic mechanical systems (MEMS) devices with horizontal and slanted electrodes	7324
Integrated Force Sensor Fabrication Process A fabrication method for Fabry-Perot etalon structures used in integrated displacement sensors/actuators for probe microscopy	3536
Method of Increasing III-Nitride Semiconductor Growth Rate A method for extremely high growth rates in PAMBE growth of GaN while maintaining a smooth surface microstructure	7009
Chemical Etching of Semiconductive Substrate Simple method using etching of substrates to produce nanostructures	6696
Solid-State 3D Printing of Metals at Room Temperature A tool to electrodeposit layers of a metal compound at room temperature for building three-dimensional geometries	7590
High-Frequency AIN-on-Silicon Resonant Square Gyroscopes A high-frequency resonant square micro-gyroscope using piezoelectric transduction	6375
Hyper Resonance Wireless Power Transmission Magnetic hyper-resonant coupling among multiple inductive-capacitive resonators	6291
Chemically-Amplified Permanent Insulator High quality insulation material with improved performance	6076
Wideband Data Transmission Using Pulse - Delay Modulation A modulation technique that uses very narrow pulses for wireless transmission of serial data bits through an inductive link	6075
Graphene Transistors: Nanoscale Electronic Components A transistor with semiconducting-type graphene layers bonded to the silicon terminal face	5766
Stiffness Trimming of High Q MEMS Clocks and Oscillators A high resolution method to trim the resonance frequency of high-Q single-crystal silicon MEMS resonators coated with a thin-film germanium layer	7184
Non-contact vital sign detection A non-contact vital sign detection system using phase locked loop (PLL) to automatically suppress the residual phase noise. A PLL is a negative feedback scheme that synchronizes the output signal with a reference	7064

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