MEMS/NEMS | Technology Licensing

Available Technologies by Category

Parametric Resonance Approach for Efficient, Versatile Acoustic Power Transfer for Implantable/Wearable Devices, Sensing, and Communications New class of transducers utilizes parametric resonance to convert acoustic energy from an ultrasonic source to a sustained electrical signal. Technology powers implantable biomedical devices, small wearable sensors, and other wireless charging applications. Simple yet robust generation of stable electromechanical frequency combs is also possible in both air and liquid environments using a capacitive micro-resonator array.	7635, 9075
Improved Discrimination Performance in MEMS-Based Gas Sensors Enhanced selectivity: Combines gravimetric and impedimetric responses to demonstrate enhanced discrimination between multiple VOCs Powerful: Enables the simultaneous observation of both mass loading and dielectric changes in polymeric sensing films upon sorption of an analyte Innovative: Uses the transient response characteristics of a sensor response to a gated exposure event, rather than steady-state sensor data	8987
Electronic Immunoassay Using Enzymatic Metallization on Microparticles Lower cost: Replacing fluorescent markers and readout methods with impedance detection has the potential to significantly decrease the cost of the assay. Transportable: Impedance measurements in microfluidics can be made transportable, which can potentially enable point-of-care applications, as electronic elements are more durable than optical elements. Practical: Identification of COVID-19 antibodies in COVID-positive serum samples has already been demonstrated.	8813
Integrated Alkali Dispenser Collimator Precise: Reducing the “spread” of vapor via collimation can reduce potential signal-to-noise ratio degradation and avoid contamination of nearby electronic components. Simple: Generating a directed atomic beam from the dispenser can be achieved via integrated packaging. Cooler: Placing a spacer material between the dispenser and collimator creates a sealed gap that not only prevents leakage, but also allows the vapor to cool (via rapid thermalization with the collimator plate).	8872
Chip-Scale Electrochemical Double-Layer (ECDL) Supercapacitors Decreased size: Minimizes space that does not contribute to volumetric density and is drastically smaller than conventional ECDL capacitors, allowing capacitor-dependent devices to shrink considerably High power: Achieves gravimetric energy densities of over 100 watt-hours per kilogram Improved performance: The vertically aligned graphene-functionalized carbon nanotubes Offers high porosity and surface area for improved pseudocapacitance by vertically aligning graphene-functionalized nanotubes	6573
A Chip-Scale Linear Ion Trap to Enable Portable Mass Spectrometers Enabling: Can be used in the development of much smaller mass spectrometers than are currently available—from benchtop devices to handheld or even smaller instruments—which would extend their use to applications in which they are not currently cost effective High-performance: Provides better than unit-mass resolution and high detection efficiency, and operates at much higher pressures than larger mass analyzers, as shown during lab-based simulations Multi-modal: Allows for several different modes of operation and enables tandem(MS/MS or MS2) or multi-stage/sequential (MSn) mass spectrometry, greatly improving capability compared with other analyzers	8137
Heat Dissipation for Microelectronic Systems via Capillary Trap Effective: Dissipates large heat fluxes via 3D heat spreading and evaporative cooling that could approach kW/cm2 and beyond while keeping the surface temperature under 90oC Preventive: Mitigates coolant dry-out at the critical heat flux levels that result in a rapid and large temperature rise and thus cause device burn-out Efficient: Exploits high cooling capabilities associated with phase-change heat transfer through evaporation	6272
Integrating Electrical Sensors into Soft-Lithography Microfluidic Devices Sophisticated: Advances the integration of electrical sensors on microfluidic devices with a simple, approachable solution Sensitive: Demonstrates a higher signal sensitivity than electrodes in a typical coplanar arrangement Adaptable: Allows for greater layout flexibility because of its straightforward fabrication process	7769
Utilizing Impedance Spectroscopy for Advanced Characterization of Particles Comprehensive: Simultaneously measures both spatial and dielectric properties of particles Streamlined: Helps resolve signal interference from coincident cells—a challenge of other assessment techniques Precise: Offers complex impedance as a new level of particle feature assessment, integrating it with other measurements such as elasticity and size for more predictive analyses	8049
Low-Cost Wearable Mass-Sensitive and Capacitive Bio/Chemical Multi-Sensor Versatile: Customizes MEMS chemical sensors, compatible with a variety of sensing materials, allowing for the detection of numerous gas-phase analytes Easy to manufacture: Uses batch-fabricated sensors compatible with COTS electronics Highly sensitive: Offers sub parts-per-million detection limits for volatile organic compounds	8269
Portable Multi-Parameter Cancer Diagnostic Tool Powerful: Simultaneously measures multiple tissue parameters to determine electro-thermo-mechanical properties Disposable: Uses single-use biochip components to eliminate cross-contamination Versatile: Uses a variety of other micromotion-capable actuators and extends to other manufacturing techniques and different length scales	7619
Rotary Mechanism for Lab-on-a-Chip Microvalves Versatile: Has an adaptable design that can be adjusted based on the substances in use, stability requirements, and shape of the device Efficient: Manages a high flow rate while maintaining a low power consumption Widely applicable: Demonstrates potential for use in a wide range of microdevices that require rotational motion	3091
Multi-Functional Sparse Phased Arrays for Guiding Focused Ultrasound Therapies Robust: Provides sensitivity of detection down to a single microbubble for FUS-induced microbubble activity Precise: Offers broadband B-mode imaging capabilities to improve workflow and efficacy of FUS-based therapies Scalable: Enables the formation of large CMUT arrays and subarrays with appropriate element spacing	8493
Technique Improves Printing Quality for 3D Nanoprinting High-performance: Enables a powerful process for high-throughput 3D printing of micro- and nanoscale structures Efficient: Reduces defects during printing to improve yield and decrease excess printing commonly observed with FP-TPL Improved: Broadens the applicability of FP-TPL to printing of functional micro- and nanoscale structures	8478
Virtually Levitated Hybrid Shell Resonator Gyroscope Low Cost – Successful fabrication and operation of micro-hemispherical shell resonators (mHSR) have provided great potential for low-cost fabrication of integrated micro-hemispherical resonating gyroscopes (mHRG). Simplified Process – Self-aligned drive, sense and tuning electrodes, all fabricated using a single wafer process Increased Sensitivity – Strong rotation rate sensitivity	6855, 6581
Resonators for Temperature-Stable Oscillators Reduced motional resistance – by using the distributed arrangement for the mode shape Performance scaling –added design freedom of the resonator Compatibility –no dimensional constraints	7780
Heterogeneous Interconnect Geometries in Electronic Packages Increased electrical performance of the interconnects Does not compromise mechanical reliability Cost effective	4120
Interconnect Geometry for Electronic Packages Enhanced electrical performance without decrease mechanical reliability Effective power distribution design and thermal management Cost effective	3883
Patterned Graphene Structures on Silicon Carbide Less damage: Growth of nanoribbons in desired shapes eliminates damage from post-processing to achieve desired dimensions. Scalable: 10,000 top-gated graphene transistors on a .24 SiC chip have been demonstrated. Room temperature operation: Prototypes exhibit an on-off ratio of 10 and carrier mobilities up to 2,700 cm2/ (V•s) at room temperature.	5589
Improved Projection Exposure System for Fabricating Nanomaterials High speed processing: Enables rapid prototyping and large-scale manufacturing Simple optics: Nano-scale patterning achieved without complex optical systems or photomasks Cost effective: Replaces slow and expensive electron beam lithography	5283
Self-Aligned HARPSS Micromechanical Variable Capacitors Results in larger-value capacitors Requires only three lithography masks	4359
MINTED: Simultaneous Deformation and Temperature Imaging Simultaneous recording of small-scale temperature and deformation fields at high spatial and time resolutions Studies deformation, failure, and heating in a range of materials Analyzes/monitors heating and failure of MEMS devices, microchips, and circuit board	8064
Electron Beam Induced Deposition of Nanostructures Unique nano-fabrication process that allows direct-write of complex 3D nano-structures (e.g. cavities and overhangs) Fabrication process compatible with variety of materials on any substrates (planar and non-planar) Provides growth rate of amorphous carbon nano-structures 3 times greater than that of standard gas-phase FEBID	6998
Flexible Electrical Interconnects with Concave/Convex Platform Co-fabrication of very complex interconnect structures for developing and testing different system topologies Improved system performance while increasing packaging density with little or no impact on the fabrication process steps used Complex shapes easily fabricated without compromising the mechanical strength or the electrical performance	6957
Fabrication of Slanted Electrodes in MEMS Devices High Performance – slanted electrodes provide more capabilities and possibilities for MEMS devices Consolidated – reduces the need for large systems of MEMS Versatile – MEMS with slanted electrodes can be applied to many applications	7324
Integrated Force Sensor Fabrication Process Fast actuation Allows for integration of sensor cantilevers	3536
Method of Increasing III-Nitride Semiconductor Growth Rate Faster growth rates result in reduced epitaxy cost Ability to grow at lower temperatures reduces thermal budget, stress and wafer bowing Ability to grow pseudo-substrates of any III-nitride alloy composition	7009
Chemical Etching of Semiconductive Substrate Quick – wafers can be processed in parallel, as compared to only one at a time with the current approach Low cost – tooling for this approach is much less expensive than that required for the currently used method; simple, inexpensive chemical	6696
Solid-State 3D Printing of Metals at Room Temperature Dispense-free nozzle Operable with solid-state of metals System complexity is reduced	7590
High-Frequency AIN-on-Silicon Resonant Square Gyroscopes Low-cost – Straightforward manufacturing process reduces cost and complexity Higher frequency operation – Realizes higher frequency of operation for resonant gyroscopes and provides higher rotation rate sensitivity	6375
Hyper Resonance Wireless Power Transmission Increases power transfer efficiency for wireless devices Reduces power consumption Improves signal-to-noise ratio	6291
Chemically-Amplified Permanent Insulator Improved – Superior electrical isolation, smaller size and cross-linking capability Cost-saving – Lower power and increased processing and manufacturing speeds	6076
Wideband Data Transmission Using Pulse - Delay Modulation Faster: Provides higher data rate wireless transmission and reception Lower power: Reduces power consumption Stronger signals: Improves signal-to-noise ratio	6075
Graphene Transistors: Nanoscale Electronic Components Faster: Near-ballistic charge transport properties Cooler: Virtually no heat generation at high speeds Stronger: 100 times stronger than steel	5766
Stiffness Trimming of High Q MEMS Clocks and Oscillators High resolution stiffness trimming of high-Q Lame mode silicon resonators Stable frequency characteristics of Ge-coated Si resonators at high processing temperatures Achieves trimming without introducing any damping throughout process	7184
Non-contact vital sign detection Automatically adjusts the feedback signals to suppress the noise when the measurement environment changes Improves SNR by 50% at 50 cm when compared to an unlocked system Detects heartbeat at 250 cm, more than twice the distance of the unlocked system	7064

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